Creative metrology development for EUVL: Flare and out-of-band qualification

Lorusso, GianGianLorussoHendrickx, EricEricHendrickxDavydova, N.N.DavydovaPeng, Y.Y.PengEurlings, M.M.EurlingsFeenstra, K.K.FeenstraJiang, J.J.Jiang2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19341Creative metrology development for EUVL: Flare and out-of-band qualificationOral presentation