Ong, PatrickPatrickOngSiebert, Joerg MaxJoerg MaxSiebertNoller, BastianBastianNollerLan, YongqingYongqingLanLauter, MichaelMichaelLauterProells, JulianJulianProellsHuang, KevinKevinHuangUsman Ibrahim, Sheik AnsarSheik AnsarUsman Ibrahim2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22887CMP Slurries for germanium substrates in FEOL applicationsMeeting abstract