Monolithic integration of InGaAs on Si(001) substrate for logic devices

Merckling, ClementClementMerckling2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31335Monolithic integration of InGaAs on Si(001) substrate for logic devicesBook chapterhttps://www.sciencedirect.com/science/article/pii/B9780081020616000033