Microwave Properties of Ba-Substituted Pb(Zr0.52Ti0.48)O3 after Chemical Mechanical Polishing

Luciano, FedericaFedericaLucianoTeugels, LieveLieveTeugelsMcMitchell, SeanSeanMcMitchellTalmelli, GiacomoGiacomoTalmelliGuerenneur, AnaisAnaisGuerenneurStheins, RenzoRenzoStheinsCaluwaerts, RudyRudyCaluwaertsConard, ThierryThierryConardVaesen, IngeIngeVaesenSergeant, StefanieStefanieSergeantVan Dorpe, PolPolVan DorpeDe Gendt, StefanStefanDe GendtDekkers, MatthijnMatthijnDekkersSwerts, JohanJohanSwertsCiubotaru, FlorinFlorinCiubotaruAdelmann, ChristophChristophAdelmann2024-01-222023-12-252024-01-2220232162-8769WOS:001122232600001https://imec-publications.be/handle/20.500.12860/43303Microwave Properties of Ba-Substituted Pb(Zr0.52Ti0.48)O3 after Chemical Mechanical PolishingJournal article10.1149/2162-8777/acf4bbWOS:001122232600001PZT THIN-FILMSTRANSDUCER