A HF vapour etch process for integration in cluster-tool processes: characteristics and applications

Vermeulen, W.J.C.W.J.C.Vermeulenkwakman, L.F.T.L.F.T.kwakmanWerkhoven, C.J.C.J.WerkhovenGranneman, E.H.A.E.H.A.GrannemanVerhaverbeke, StevenStevenVerhaverbekeHeyns, MarcMarcHeyns2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/494A HF vapour etch process for integration in cluster-tool processes: characteristics and applicationsProceedings paper