Fyen, WimWimFyenArnauts, SophiaSophiaArnautsHolsteyns, FrankFrankHolsteynsDoumen, GeertGeertDoumenVereecke, GuyGuyVereeckeVan Steenbergen, JanJanVan SteenbergenMertens, PaulPaulMertens2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10471Performance of a linear single wafer IPA vapour based drying systemProceedings paper