Electrical study of sulfur passivated In0.53Ga0.47As MOS capacitor and transistor

Lin, DennisDennisLinWang, Wei-EWei-EWangBrammertz, GuyGuyBrammertzMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-182021-10-1820090167-9317https://imec-publications.be/handle/20.500.12860/15724Electrical study of sulfur passivated In0.53Ga0.47As MOS capacitor and transistorJournal articlehttp://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V0W-4VXB6XM-6&_user=799533&_coverDate=09%2F30%2F2009&_rdoc=11&_fmt=hi