Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloSuri, MayurMayurSuriDurant, StephaneStephaneDurantCross, AndrewAndrewCrossNagaswami, VenkatVenkatNagaswamiVan Den Heuvel, DieterDieterVan Den HeuvelGronheid, RoelRoelGronheidNealey, PaulPaulNealey2021-10-212021-10-2120131537-1646https://imec-publications.be/handle/20.500.12860/22999Defect source analysis of directed self-assembly processJournal article