Goethals, MiekeMiekeGoethalsGronheid, RoelRoelGronheidList, ScottScottListErcken, MoniqueMoniqueErckenVan Roey, FriedaFriedaVan RoeyVan Den Heuvel, DieterDieterVan Den HeuvelLocorotondo, SabrinaSabrinaLocorotondoRonse, KurtKurtRonse2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8965157nm resist process performance and integration challenges on a full field scannerJournal article