ABI tool performance confirmation by NXE3300 printing results for native EUV blank defects at 16nm half pitch

Jonckheere, RikRikJonckheereYamane, TakeshiTakeshiYamaneTakagi, NoriakiNoriakiTakagiWatanabe, HidehiroHidehiroWatanabeBeral, ChristopheChristopheBeral2021-10-232021-10-232016-11https://imec-publications.be/handle/20.500.12860/26786ABI tool performance confirmation by NXE3300 printing results for native EUV blank defects at 16nm half pitchProceedings paperhttp://eidec.co.jp/EUVLSymp2016/