Defects, junction leakage and electrical performance of Ge pFET devices

Eneman, GeertGeertEnemanSimoen, EddyEddySimoenYang, RuiRuiYangDe Jaeger, BriceBriceDe JaegerWang, GangGangWangMitard, JeromeJeromeMitardHellings, GeertGeertHellingsBrunco, DavidDavidBruncoLoo, RogerRogerLooDe Meyer, KristinKristinDe MeyerCaymax, MattyMattyCaymaxClaeys, CorCorClaeysMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15276Defects, junction leakage and electrical performance of Ge pFET devicesProceedings paper