Measurement and simulation of boron diffusion in strained Si1-xGex epitaxial layers with linearly graded germanium profile

Krishnasamy, RajendranRajendranKrishnasamySchoenmaker, WimWimSchoenmaker2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4684Measurement and simulation of boron diffusion in strained Si1-xGex epitaxial layers with linearly graded germanium profileProceedings paper