Effect of linear antenna chemical vapor deposition process parameters on the growth of nanocrystalline diamond-on-GaN films

Mallik, AwadeshAwadeshMallikPobedinskas, PauliusPauliusPobedinskasKrishnamurthy, GiridharanGiridharanKrishnamurthyShih, Wen-ChingWen-ChingShihHaenen, KenKenHaenenkrishnam2024-11-182024-08-162024-11-1820240022-0248WOS:001288686300001https://imec-publications.be/handle/20.500.12860/44337Effect of linear antenna chemical vapor deposition process parameters on the growth of nanocrystalline diamond-on-GaN filmsJournal article10.1016/j.jcrysgro.2024.127836WOS:001288686300001PLASMA CVDGALLIUM NITRIDELOW-PRESSUREMICROWAVERAMANSPECTROSCOPYTEMPERATURESNUCLEATIONAPPARATUSSPECTRA