Vaglio Pret, AlessandroAlessandroVaglio PretGronheid, RoelRoelGronheidYounkin, ToddToddYounkinLeeson, Michael J.Michael J.LeesonYan, Pei-YangPei-YangYan2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21661Impact of EUV mask surface roughness on LERProceedings paper