FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits

Capogreco, ElenaElenaCapogrecoArimura, HiroakiHiroakiArimuraRitzenthaler, RomainRomainRitzenthalerBrus, StephanStephanBrusOniki, YusukeYusukeOnikiDupuy, EmmanuelEmmanuelDupuySebaai, FaridFaridSebaaiRadisic, DunjaDunjaRadisicChan, BTBTChanZhou, DaisyDaisyZhouMachkaoutsan, V.V.MachkaoutsanYoon, S.S.YoonItokawa, H.H.ItokawaYamaguchi, M.M.YamaguchiGao, Z.Z.GaoFazan, P.P.FazanChen, Y.Y.ChenSubramanian, SujithSujithSubramanianRagnarsson, Lars-AkeLars-AkeRagnarssonSpessot, AlessioAlessioSpessotDentoni Litta, EugenioEugenioDentoni Litta2023-06-012023-05-252023-06-0120222380-9248WOS:000968800700079https://imec-publications.be/handle/20.500.12860/41631FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral CircuitsProceedings paper10.1109/IEDM45625.2022.10019422978-1-6654-8959-1WOS:000968800700079