Hauptmann, MarcMarcHauptmannBrems, StevenStevenBremsCamerotto, ElisabethElisabethCamerottoZijlstra, AaldertAaldertZijlstraDoumen, GeertGeertDoumenBearda, TwanTwanBeardaMertens, PaulPaulMertensLauriks, WalterWalterLauriks2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/17238Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaningJournal article