Effect of thermomechanical stress on resonant frequency shift of a silicon MEMS resonator

Gonzalez, MarioMarioGonzalezJourdain, AnneAnneJourdainVandevelde, BartBartVandeveldeTilmans, HarrieHarrieTilmans2021-10-172021-10-172008-04https://imec-publications.be/handle/20.500.12860/13784Effect of thermomechanical stress on resonant frequency shift of a silicon MEMS resonatorProceedings paper