Marshall, OwenOwenMarshallHsu, MarkMarkHsuWang, ZhechaoZhechaoWangKunert, BernardetteBernardetteKunertKoos, ChristianChristianKoosVan Thourhout, DriesDriesVan Thourhout2021-10-252021-10-252018-120018-9219https://imec-publications.be/handle/20.500.12860/31297Heterogeneous integration on silicon photonicsJournal articlehttps://ieeexplore.ieee.org/document/8453029