Hikavyy, AndriyAndriyHikavyyZyulkov, IvanIvanZyulkovMertens, HansHansMertensWitters, LiesbethLiesbethWittersLoo, RogerRogerLooHoriguchi, NaotoNaotoHoriguchi2021-10-242021-10-2420171369-8001https://imec-publications.be/handle/20.500.12860/28515Use of high order precursors for manufacturing Gate all around devicesJournal articlehttp://www.sciencedirect.com/science/article/pii/S136980011630484X