Nondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopy

Flannery, C. M.C. M.FlanneryBaklanov, MikhaïlMikhaïlBaklanov2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6323Nondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopyProceedings paper