Vereecke, GuyGuyVereeckeDe Coster, HanneHanneDe CosterCarolan, PatrickPatrickCarolanBender, HugoHugoBenderWillems, KherimKherimWillemsRagnarsson, Lars-AkeLars-AkeRagnarssonVan Dorpe, PolPolVan DorpeHoriguchi, NaotoNaotoHoriguchiHolsteyns, FrankFrankHolsteyns2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27522Kinetics of chemical etching in nano-confined volumesMeeting abstract