High-precision optical constants characterization of materials in the EUV spectral range: From large research facilities to laboratory-based instruments

Soltwisch, V.V.SoltwischGlabisch, S.S.GlabischAndrle, A.A.AndrlePhilipsen, VickyVickyPhilipsenSaadeh, Q.Q.SaadehSchroder, S.S.SchroderLohr, L.L.LohrCiesielski, R.R.CiesielskiBrose, S.S.Brose2023-06-012022-12-112023-06-012022978-1-5106-6049-60277-786XWOS:000890070800011https://imec-publications.be/handle/20.500.12860/40862High-precision optical constants characterization of materials in the EUV spectral range: From large research facilities to laboratory-based instrumentsProceedings paper10.1117/12.2640176978-1-5106-6050-2WOS:000890070800011EXTREME-ULTRAVIOLETFILMS