van Andel, YvonneYvonnevan AndelJambunathan, MadhusudhananMadhusudhananJambunathanVullers, RuudRuudVullersLeonov, VladimirVladimirLeonov2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/18139Membrane-less in-plane bulk-micromachined thermopiles for energy harvestingJournal article