Conformal ultra shallow junctions by vapor phase doping with boron

Nguyen, DuyDuyNguyenLeys, FrederikFrederikLeysTakeuchi, ShotaroShotaroTakeuchiLoo, RogerRogerLooCaymax, MattyMattyCaymaxEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172008-05https://imec-publications.be/handle/20.500.12860/14215Conformal ultra shallow junctions by vapor phase doping with boronProceedings paper