Majeed, BivraghBivraghMajeedDe Malsche, WimWimDe MalscheFiorini, PaoloPaoloFioriniSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanSoussan, PhilippePhilippeSoussan2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17554Silicon fabrication technologies for micro filtersProceedings paper