Characterization of the spatial charge distribution in local charge-trapping memory devices using the charge pumping technique

Rosmeulen, MaartenMaartenRosmeulenBreuil, LaurentLaurentBreuilLorenzini, MartinoMartinoLorenziniHaspeslagh, LucLucHaspeslaghVan Houdt, JanJanVan HoudtDe Meyer, KristinKristinDe Meyer2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8087Characterization of the spatial charge distribution in local charge-trapping memory devices using the charge pumping techniqueOral presentation