Liu, ZuyangZuyangLiuMuliuk, GrigorijGrigorijMuliukZhang, JingJingZhangRoelkens, GuntherGuntherRoelkensLe Thomas, NicolasNicolasLe ThomasBaets, RoelRoelBaets2023-08-242023-06-202023-08-242022978-1-5106-4879-10277-786XWOS:000836324200003https://imec-publications.be/handle/20.500.12860/41805Micro-transfer printed silicon nitride grating couplers for efficient on-chip light couplingProceedings paper10.1117/12.2626309978-1-5106-4880-7WOS:000836324200003