Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB)

Kim, Min-SooMin-SooKimRitzenthaler, RomainRomainRitzenthalerEveraert, Jean-LucJean-LucEveraertFernandez, LuisLuisFernandezDevriendt, KatiaKatiaDevriendtLee, Jae WooJae WooLeeRedolfi, AugustoAugustoRedolfiMertens, SofieSofieMertensBurke, EdEdBurkeHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronThean2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22600Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)Proceedings paper