Flexible and robust capping-metal gate integration technology enabling multiple-VT CMOS in MuGFETs

Veloso, AnabelaAnabelaVelosoWitters, LiesbethLiesbethWittersDemand, MarcMarcDemandFerain, IsabelleIsabelleFerainSon, Nak-JimNak-JimSonKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselSimoen, EddyEddySimoenKauerauf, ThomasThomasKaueraufAdelmann, ChristophChristophAdelmannBrus, StephanStephanBrusRichard, OlivierOlivierRichardBender, HugoHugoBenderConard, ThierryThierryConardVos, RitaRitaVosRooyackers, RitaRitaRooyackersVan Elshocht, SvenSvenVan ElshochtCollaert, NadineNadineCollaertDe Meyer, KristinKristinDe MeyerBiesemans, SergeSergeBiesemansJurczak, GosiaGosiaJurczak2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14734Flexible and robust capping-metal gate integration technology enabling multiple-VT CMOS in MuGFETsProceedings paper