Gielis, SvenSvenGielisIvanov, MaksimMaksimIvanovPeys, NickNickPeysVan den Ham, JonathanJonathanVan den HamPavlovic, NikolinaNikolinaPavlovicRobaeys, PieterPieterRobaeysNesladek, MilosMilosNesladekBanys, JurasJurasBanysHardy, AnAnHardyVan Bael, MarliesMarliesVan Bael2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25315Aqueous chemical solution deposition of LuFeO3 ultra high-k filmsOral presentation