Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators

Yu, HuiHuiYuPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutKorn, D.D.KornKomorowska, KatarzynaKatarzynaKomorowskaDumon, PieterPieterDumonLi, YanLuYanLuLiVerheyen, PeterPeterVerheyenAbsil, PhilippePhilippeAbsilAlloatti, LucaLucaAlloattiHillerkuss, D.D.HillerkussLeuthold, J.J.LeutholdBaets, RoelRoelBaetsBogaerts, WimWimBogaerts2021-10-202021-10-202012-061094-4087https://imec-publications.be/handle/20.500.12860/21903Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulatorsJournal article