Swerts, JohanJohanSwertsDeweerd, WimWimDeweerdDe Witte, HildeHildeDe WitteMaes, JanJanMaesWilk, GlennGlennWilkDelabie, AnneliesAnneliesDelabie2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11294Engineering ALCVD HfSiO gate stacks for LSTP applicationsOral presentation