Van Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannClima, SergiuSergiuClimaPourtois, GeoffreyGeoffreyPourtoisConard, ThierryThierryConardDelabie, AnneliesAnneliesDelabieFranquet, AlexisAlexisFranquetLehnen, PeerPeerLehnenMeersschaut, JohanJohanMeersschautMenou, NicolasNicolasMenouPopovici, Mihaela IoanaMihaela IoanaPopoviciRichard, OlivierOlivierRichardSchram, TomTomSchramWang, Xin PengXin PengWangHardy, AnAnHardyDewulf, DaanDaanDewulfVan Bael, MarliesMarliesVan BaelBlomberg, T.T.BlombergPierreux, DieterDieterPierreuxSwerts, JohanJohanSwertsMaes, JanJanMaesWouters, DirkDirkWoutersDe Gendt, StefanStefanDe GendtKittl, JorgeJorgeKittl2021-10-182021-10-1820091071-1023https://imec-publications.be/handle/20.500.12860/16380Alternative high-k dielectrics for semiconductor applicationsJournal article