Alvarez, D.D.AlvarezSchömann, S.S.SchömannGoebel, B.B.GoebelManger, D.D.MangerSchlösser, T.T.SchlösserSlesazeck, S.S.SlesazeckHartwich, J.J.HartwichKretz, J.J.KretzEyben, PierrePierreEybenFouchier, MarcMarcFouchierVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004-01https://imec-publications.be/handle/20.500.12860/8475High-resolution scanning spreading resistance microscopy of surrounding-gate transistorsJournal article