Eslava Fernandez, SalvadorSalvadorEslava FernandezEymery, GuillaumeGuillaumeEymeryMarsik, PremyslPremyslMarsikIacopi, FrancescaFrancescaIacopiKirschhock, Christine E. A.Christine E. A.KirschhockMaex, KarenKarenMaexMartens, Johan A.Johan A.MartensBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-1720080013-4651https://imec-publications.be/handle/20.500.12860/13704Optical property changes in low-k films upon ultraviolet-assisted curingJournal article