Cornagliotti, EmanueleEmanueleCornagliottiTous, LoicLoicTousUruena De Castro, AngelAngelUruena De CastroRothschild, AudeAudeRothschildRussell, RichardRichardRussellLu, VincentVincentLuRadosavljevic, SanjaSanjaRadosavljevicJohn, JoachimJoachimJohnToman, JanosJanosTomanAleman, MonicaMonicaAlemanDuerinckx, FilipFilipDuerinckxPoortmans, JefJefPoortmansSzlufcik, JozefJozefSzlufcikDielissen, BasBasDielissenSouren, FloorFloorSourenGay, XavierXavierGayGortzen, RogerRogerGortzenHallam, BrettBrettHallam2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22173Integration of spatial ALD aluminum oxide for rear side passivation of p-type PERC/PERL solar cellsProceedings paper