Popovici, Mihaela IoanaMihaela IoanaPopoviciKaczer, BenBenKaczerAfanasiev, ValeriValeriAfanasievSereni, GabrieleGabrieleSereniLarcher, LucaLucaLarcherRedolfi, AugustoAugustoRedolfiVan Elshocht, SvenSvenVan ElshochtJurczak, GosiaGosiaJurczak2021-10-232021-10-2320161862-6254https://imec-publications.be/handle/20.500.12860/27163Low leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitorsJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201600036/abstract