Potential and limitations of UTBB SOI for advanced CMOS technologies

Claeys, CorCorClaeysAoulaiche, MarcMarcAoulaicheSimoen, EddyEddySimoenNicoletti, TalithaTalithaNicolettidos Dantos, SaraSarados DantosMartino, JoaoJoaoMartino2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22154Potential and limitations of UTBB SOI for advanced CMOS technologiesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6676185&queryText%3DPotential+and+limitations+of+UTBB+SOI+for+adv