Wang, X.P.X.P.WangYang, J.J.J.J.YangChen, J.D.J.D.ChenXie, R.L.R.L.XieLi, M.-F.M.-F.LiZhu, C.X.C.X.ZhuYu, HongYuHongYuYuDu, A.Y.A.Y.DuLim, P.C.P.C.LimLim, AndyAndyLimMi, Y.Y.Y.Y.MiLai, Doreen M.Y.Doreen M.Y.LaiLoh, W.Y.W.Y.LohBiesemans, SergeSergeBiesemansLo, G.Q.G.Q.LoKwong, D.-L.D.-L.Kwong2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13214Practical solutions to enhance EWF tunability of Ni FUSI gate electrode on HfO2Proceedings paper