Favia, PaolaPaolaFaviaPopovici, Mihaela IoanaMihaela IoanaPopoviciEneman, GeertGeertEnemanWang, GangGangWangBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenMenou, NicolasNicolasMenouBender, HugoHugoBender2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17098Nano beam diffraction: crystal structure and strain analysis at the nano-scaleMeeting abstract