TEM sample preparation by FIB for carbon nanotube interconnects

Ke, XiaoxingXiaoxingKeBals, SaraSaraBalsRomo Negreira, AinhoaAinhoaRomo NegreiraHantschel, ThomasThomasHantschelBender, HugoHugoBenderVan Tendeloo, GustaafGustaafVan Tendeloo2021-10-172021-10-1720090304-3991https://imec-publications.be/handle/20.500.12860/15580TEM sample preparation by FIB for carbon nanotube interconnectsJournal article