The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications

Gromova, MariaMariaGromovaBaert, KrisKrisBaertVan Hoof, ChrisChrisVan HoofMehta, A.A.MehtaWitvrouw, AnnAnnWitvrouw2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8986The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applicationsJournal article