Galvanic corrosion issues related to copper/barrier CMP via inline electrochemical measurements

Teugels, LieveLieveTeugelsNagar, MagiMagiNagarLi, YunlongYunlongLiHeylen, NancyNancyHeylen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18079Galvanic corrosion issues related to copper/barrier CMP via inline electrochemical measurementsProceedings paper