Microbumping technology for hybrid IR detectors, 10 $lm pitch and beyond

Majeed, BivraghBivraghMajeedSoussan, PhilippePhilippeSoussanLe Boterf, P.P.Le BoterfBouillon, P.P.Bouillon2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24185Microbumping technology for hybrid IR detectors, 10 $lm pitch and beyondProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7028336