Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors

Groven, BenjaminBenjaminGrovenHeyne, MarkusMarkusHeyneHaesevoets, KarelKarelHaesevoetsMeersschaut, JohanJohanMeersschautNuytten, ThomasThomasNuyttenConard, ThierryThierryConardVerdonck, PatrickPatrickVerdonckVan Elshocht, SvenSvenVan ElshochtHeyns, MarcMarcHeynsRadu, IulianaIulianaRaduDelabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymax2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25342Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursorsProceedings paper