Rothschild, AudeAudeRothschildShi, XiaopingXiaopingShiEveraert, Jean-LucJean-LucEveraertKerner, ChristophChristophKernerChiarella, ThomasThomasChiarellaHoffmann, ThomasThomasHoffmannVrancken, ChristaChristaVranckenShickova, AdelinaAdelinaShickovaYoshinao, H.H.YoshinaoMitsuhashi, RiichirouRiichirouMitsuhashiNiwa, MasaakiMasaakiNiwaLauwers, AnneAnneLauwersVeloso, AnabelaAnabelaVelosoKittl, JorgeJorgeKittlAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12808Achieving 9ps unloaded ring oscillator delay in FuSI/HfSiON with 0.8 nm EOTProceedings paper