Better prediction on patterning failure mode with hotspot aware OPC modeling

Wei, Chih-IChih-IWeiWu, StewartStewartWuDeng, YunfeiYunfeiDengKhaira, GurdamanGurdamanKhairaKusnadi, I.I.KusnadiFenger, G.G.FengerKang, S.S.KangOkamoto, Y.Y.OkamotoMaruyama, K.K.MaruyamaYamaszaki, Y.Y.YamaszakiDas, SayantanSayantanDasHalder, SandipSandipHalderGillijns, WernerWernerGillijnsLorusso, GianGianLorusso2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37372Better prediction on patterning failure mode with hotspot aware OPC modelingProceedings paperhttps://doi.org/10.1117/12.2583837