Baklanov, MikhaïlMikhaïlBaklanovZhang, LipingLipingZhangDussart, RemiRemiDussartde Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22015Damage free cryogenic etch of ultra low-k materials: recent experimental results and theoretical analysisProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6615562&contentType=Conference+Publications