Study on the dispersion control of AlGaN/GaN buffers grown by MOCVD on 200 mm Si (111)

Zhao, MingMingZhaoStoffels, SteveSteveStoffelsVan Hove, MarleenMarleenVan HoveKandaswamy, Prem KumarPrem KumarKandaswamyLiang, HuHuLiangDecoutere, StefaanStefaanDecoutere2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27668Study on the dispersion control of AlGaN/GaN buffers grown by MOCVD on 200 mm Si (111)Meeting abstracthttp://www.mrs.org/icmovpe-xviii-program-pdf/