Hirayama, TakuTakuHirayamaUtsumi, YoshiyukiYoshiyukiUtsumiIwashita, JunJunIwashitaKawana, DaisukeDaisukeKawanaLorusso, GianGianLorusso2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22492Development status of EUV resistProceedings paper